Operating Range:
5°C to 80°C (-10°C to 80°C with N2 option)
LT Option required if operating below 0°C
Ambient Temperature:
10°C to 40°C non-condensing
Stability / Repeatability:
± 0.05°C at constant load (even near ambient)
Cooling Capacity*:
~1,200 watts @ 20°C with 20°C facility water
Heating Capacity**:
~2,000 watts @ 20°C with 20°C facility water
Coolant / Process Fluid:
Fluorinert / Galden / HFE or Water/Glycol
Process Fluid Fittings:
1/2" Swagelok (316 stainless steel)
Pump:
Brushless DC magnetically driven centrifugal
Flow Rate
14-18 lpm @ 20 psig (process fluid dependent)
Tank Volume:
5.7 liter (1.5 gal) with 2 level sensors
Facility Water:
4-19 lpm (1-5 gpm) @ 10-35°C filtered, treated recirculating facility cooling water, pH 6.5 to 8.2
Facility Water Fittings:
1/2" Swagelok (316 stainless steel)
N2/CDA (N2 Option)
500 sccm -30°C dew point or lower CDA or N2,
30-60 psig (2-4 bar) for low temperature operation
Wetted Materials:
Process: Aluminum, stainless steel and polymers
Facility: Sealed hard anodized aluminum
and stainless steel
Size (W x D x H):
19" x 24" x 8.7" 5U (48 cm x 61 cm x 22 cm)
Power Input:
200-240 VAC 1 phase, 50/60 Hz, 10 amp max
Circuit Breaker:
16 amp 200-250 VAC 2-pole with 30 mA GFCI
Remote EMO:
External dry contact
Communications:
Lam, Applied Materials, TEL, RS232, others
Alarms:
Temperature, fluid level, system or component
failure (display, dry contact and machine interface)
Standards:
Semi S2-0200, F47 compliant, CE
*Note: Cooling capacity will vary with configuration and faclity water temperature / flow rates
**Note: Heating capacity is very limited at 80°C. Contact SSCS to discuss our Auxiliary Heater.