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Nikola 3K/5K
High capacity thermoelectric chillers for Plasma Etch and other Semi Applications
Why choose Nikola 3K/5K?
- Our highest capacity chillers designed specifically for semiconductor processing
- 3,000 or 5,000 watts of cooling capacity
- ±0.05°C Temperature Stability/repeatability
- Two pump options for flows up to 10 gpm and pressure up to 100+ psig
- Reduces wafer to wafer variations and eliminates first wafer effect
- Up to 80% more energy efficient than compressor-based chillers
- Uses thermoelectric technology for high reliability and reduced maintenance cost
- Modular design for easy maintenance
- Eliminates Freon and other harmful refrigerants to comply with new environmental regulations
- Uses less facility water and expensive coolants, such as Fluorinert or Galden
- Communication interfaces available for AMAT, LAM, TEL and Hitachi systems
- Universal power – plug in and go anywhere in the world
- An excellent solution for plasma etch, plasma ash, metrology, CMP and other processes
Performance
Specifications
Operating Range:
-10°C to 80°C
Ambient Temperature:
10°C to 40°C non-condensing
Stability / Repeatability:
± 0.05°C at constant load (even near ambient)
Cooling Capacity*:
Nikola 3K: 3000 Watts @ 20°C (20°C facility water)
Nikola 5K: 5000 Watts @ 20°C (20°C facility water)
Nikola 5K: 5000 Watts @ 20°C (20°C facility water)
Coolant / Process Fluid:
Set up for Fluorinert / Galden or HFE fluids
Optional Glycol / Water configuration available
Optional Glycol / Water configuration available
Process Fluid Fittings:
3/4" Swagelok (316 stainless steel)
Pump:
Magnetically coupled turbine (Power Efficient or High Power)
Flow Rate:
Up to 10 gpm (38 lpm) with adjustable flow and
pressure (10 to 100 psig)
pressure (10 to 100 psig)
Tank Volume:
10 liter (2.6 gal) with 2 level sensors
Facility Water:
25 lpm (6 gpm) @ 7-25°C filtered, treated recirculating facility cooling water, pH 6.5 to 8.2
Facility Water Fittings:
3/4" Swagelok (316 stainless steel)
N2/CDA (required):
500 sccm -30°C dew point or lower CDA or N2,
30-60 psig (2-4 bar) for low temperature operation
30-60 psig (2-4 bar) for low temperature operation
Wetted Materials:
Process: Aluminum, stainless steel and polymers
Facility: Sealed hard anodized aluminum
and stainless steel
Facility: Sealed hard anodized aluminum
and stainless steel
Size (W x D x H):
22" x 28" x 35" (56 cm x 71 cm x 89 cm)
Weight:
~300 lbs (136 kg) dry
Power Input:
200-240 VAC 3 phase, 50/60 Hz, 20/30 amp max
Circuit Breaker:
20/30 amp 480 VAC 3-pole with GFCI
Remote EMO:
External dry contact
Communications:
Lam, Applied Materials, TEL, RS232, others
Alarms:
Temperature, fluid level, system or component
failure (display, dry contact and machine interface)
failure (display, dry contact and machine interface)
Standards:
Semi S2-0200, F47 compliant, CE
Warranty:
2 years
* Note: Cooling capacity will vary with configuration and faclity water temperature / flow rates